Insulation structure of high voltage electrodes for ion implantation apparatus

摘要

An insulation structure of high voltage electrodes includes an insulator having an exposed surface and a conductor portion, which includes a joint region in contact with the insulator, and a heat-resistant portion provided, along at least part of an edge of the joint region, in such a manner as to be adjacent to the exposed surface of the insulator. The heat-resistant portion is formed of an electrically conductive material whose melting point is higher than that of the conductor portion. The heat-resistant portion may be so provided as to have a gap between the insulator and the exposed surface.

主权项

1. An insulation structure of high voltage electrodes for an ion implantation apparatus, the insulation structure comprising:
two conductor portions that are electrodes; and an insulator provided between the two conductor portions, wherein the two conductor portions are individually connected to the insulator, wherein the insulator has an exposed surface to a vacuum space, wherein each of the two conductor portions includes a conductor body having a joint region having contact with the insulator, an exposed region to the vacuum space, and a boundary zone lying between the joint region and the exposed region, wherein at least one of the two conductor portions has at least one heat-resistant conductor element disposed on the conductor body, and wherein the heat-resistant conductor element is provided on at least part of the boundary zone in such a manner as to be adjacent to the exposed surface of the insulator, and the heat-resistant conductor element is formed of a conductive material whose melting point is higher than that of the conductor portion.