Vitreous silica crucible

摘要

Provided is a vitreous silica crucible which has a special region for suppressing vibration of melt surface during pulling of a silicon single crystal and at the same time, a marking capable of accurately monitoring a changed position of the melt surface when passing through the special region. The special region for preventing sloshing of silicon melt is provided on an inner wall of a straight body portion, and the marking is provided at least at an upper end and a lower end of the special region.

主权项

1. A vitreous silica crucible containing silicon melt, the vitreous silica crucible comprising:
a special region for suppressing sloshing of melt surface of the silicon melt, provided on an inner wall of a straight body portion; and a marking, which is not a part of the special region, installed at least an upper end and a lower end of the special region, wherein the marking installed at the upper end of the special region is disposed at a location which is almost or completely in non-contact with the silicon melt during an entire period of pulling a silicon crystal, wherein the special region is made of vitreous silica whose raw material is primarily natural silica, and transparent layer other than the special region is made of vitreous silica whose raw material is primarily synthetic silica, and the marking is constituted by dot-shaped recesses each having a depth of 0.2 mm or more and diameter of 0.5 to 3.0 mm, and said dot-shaped recesses are aligned on the inner wall along a horizontal direction.