Field focusing features in a ReRAM cell

摘要

A resistive random access memory (ReRAM) cell comprising a first conductive electrode and a dielectric storage material layer over the first conductive electrode. The dielectric storage material layer is conducive to the formation of conductive filaments during the application of a filament forming voltage to the cell. The cell includes a second conductive electrode over the dielectric storage material layer and a layer of conductive nanoclusters (911, 1211) including a plurality of nanoclusters in contact with the dielectric storage material layer and in contact with the first conductive electrode or the second conductive electrode.

主权项

1. A method for forming a resistive random access memory (ReRAM) cell, comprising:
forming a first conductive layer; forming a dielectric storage material layer over the first conductive layer, the dielectric storage material layer conducive to the formation of conductive filaments during an application of a filament forming voltage to the ReRAM cell; forming a second conductive layer over the dielectric storage material layer; forming a layer of conductive nanoclusters including a plurality of nanoclusters in contact with the dielectric storage material layer and in contact with the first conductive layer or the second conductive layer, wherein the ReRAM cell includes a first plurality of the conductive nanoclusters of the layer of conductive nanoclusters; wherein the forming a layer of conductive nanoclusters includes forming the layer of conductive nanoclusters by process wherein conductive nanoclusters of the plurality of nanoclusters nucleate and grow; wherein the first plurality of conductive nanoclusters of the layer of conductive nanoclusters are further characterized as field focusing features of the ReRAM cell.