Method of manufacturing glass substrate with concave-convex film using dry etching, glass substrate with concave-convex film, solar cell, and method of manufacturing solar cell

摘要

[Problem] A problem is to provide a method of manufacturing a glass substrate with a concave-convex film using dry etching capable of giving a fine concave-convex structure precisely by dry etching, a glass substrate with a concave-convex structure, a solar cell, and a method of manufacturing a solar cell.;[Means to Solve the Problem] In order to give a concave-convex structure to a glass substrate made of a plurality of oxides placed in different vapor pressures during dry etching, a subject film forming step and a concave-convex structure forming step are provided. The subject film forming step forms a subject film made of a single material on a flat surface of the glass substrate. The concave-convex structure forming step forms a periodic concave-convex structure in a surface of the subject film by dry etching. As a result, a fine concave-convex structure is formed precisely by dry etching.

主权项

1. A method of manufacturing a solar cell, comprising:
forming a subject film comprising a single material on a surface of a glass substrate by one of sputtering process, vacuum deposition process and chemical vapor deposition (CVD) process, the subject film having a refractive index substantially the same as a refractive index of the glass substrate, the glass substrate comprising a plurality of oxides whose vapor pressures during dry etching differ from each other; forming a periodic concave-convex structure on a surface of the subject film by dry etching, the concave-convex structure having a period of less than 1 μm for asperities of the concave-convex structure; depositing a transparent conductive film on the glass substrate with the concave-convex film to a thickness determined such that a concave-convex structure resulting from the concave-convex structure of the concave-convex film is formed in a surface of the transparent conductive film; forming a photoelectric conversion layer on the transparent conductive film to a thickness determined such that a concave-convex structure resulting from the concave-convex structure of the transparent conductive film is formed in a surface of the photoelectric conversion layer; and forming a back surface reflection layer and a back surface electrode layer on the photoelectric conversion layer to a thickness determined such that a concave-convex structure resulting from the concave-convex structure of the photoelectric conversion layer is formed in a surface of the back surface reflection layer and the back surface electrode layer, wherein the concave-convex structure of the concave-convex film and the concave-convex structure of the transparent conductive film each have a period less than an optical wavelength corresponding to a wavelength of an absorption edge of the photoelectric conversion layer.