发明名称 |
Plasma generation device |
摘要 |
There is provided a plasma generation device capable of suppressing arc discharge in which discharge is localized to cause a high temperature, and allowing atmospheric discharge plasma to be stably generated with a high generation efficiency in a low temperature at about a room temperature without being spatially biased. The plasma generation device arranged with a plurality of electrodes facing each other includes a discharge position control unit, which is arranged between each of the plurality of electrodes, and is formed by containing an inverse characteristic material composed of a fluid having polarizability and a property that dielectric constant decreases with an increase in temperature, in a container formed of a dielectric material, wherein the inverse characteristic material is spaced apart from each of the plurality of electrodes. |
申请公布号 |
US9114373(B2) |
申请公布日期 |
2015.08.25 |
申请号 |
US201414274261 |
申请日期 |
2014.05.09 |
申请人 |
SAGA University |
发明人 |
Misawa Tatsuya;Hayashi Nobuya |
分类号 |
H01J17/26;H01J61/28;B01J19/08;H05H1/24 |
主分类号 |
H01J17/26 |
代理机构 |
Dingman, McInnes & McLane, LLP |
代理人 |
Dingman, McInnes & McLane, LLP |
主权项 |
1. A plasma generation device arranged with a plurality of electrodes facing each other, comprising:
a discharge position control unit, which is arranged between each of the plurality of electrodes, and is formed by containing an inverse characteristic material composed of a fluid having polarizability and a property that dielectric constant decreases with an increase in temperature, in a container formed of a dielectric material; wherein the inverse characteristic material is spaced apart from each of the plurality of electrodes. |
地址 |
Saga JP |