| 发明名称 | Contact probe having carbon film on surface thereof | ||
| 摘要 | A contact probe includes a base material, a carbon film provided on a tip of the contact probe and configured to contact with an electrode, and an intermediate layer provided between the carbon film and the base material. The carbon film includes a metal element. A concentration of the metal element in the carbon film surface is lower than an average concentration of the metal element in a whole of the carbon film. The carbon film further includes: a plurality of layers, each of the plurality of layers having a uniform concentration of the metal element along a direction of a thickness of the carbon film; a layer in which the concentration of the metal element is continuously changed along a direction of a thickness of the carbon film; or both thereof. | ||
| 申请公布号 | US9116173(B2) | 申请公布日期 | 2015.08.25 |
| 申请号 | US201113697248 | 申请日期 | 2011.05.10 |
| 申请人 | Kobe Steel, Ltd.;KOBELCO RESEARCH INSTITUTE, INC. | 发明人 | Hirano Takayuki;Kobori Takashi |
| 分类号 | G01R31/00;G01R1/067;G01R35/00;G01R3/00 | 主分类号 | G01R31/00 |
| 代理机构 | Oblon, McClelland, Maier & Neustadt, L.L.P. | 代理人 | Oblon, McClelland, Maier & Neustadt, L.L.P. |
| 主权项 | 1. A contact probe comprising: a base material; a carbon film provided on a tip of the contact probe and configured to contact with an electrode, the carbon film comprising a metal element; and an intermediate layer provided between the carbon film and the base material, wherein a concentration of the metal element in the carbon film surface is lower than an average concentration of the metal element in a whole of the carbon film, and wherein the carbon film further comprises: a plurality of layers, each of the plurality of layers having a uniform concentration of the metal element along a direction of a thickness of the carbon film, or having a concentration which is continuously changed along the direction of the thickness of the carbon film. | ||
| 地址 | Kobe-shi JP | ||