Microelectromechanical system package and method of testing

摘要

A microelectromechanical system (MEMS) package is disclosed herein. The MEMS package includes a movable mass. The MEMS package further includes a first and second sense electrodes spaced apart from the movable mass. The first and second sense electrodes are configured to be electrically coupled with a controller. The MEMS package further includes a first test electrode and a second test electrode spaced apart from the movable mass. The first and the second test electrodes are configured to be electrically connected to first and second external electrical connectors, respectively. The first and second test electrodes are biased at a first voltage and a second voltage, respectively, when the first and second external electrical connectors are connected to external voltage sources.

主权项

1. A microelectromechanical system package comprising:
a movable mass connected to a substrate; a first sense electrode spaced apart from the movable mass at a first location and configured to be electrically coupled with a controller; a second sense electrode spaced apart from the movable mass at a second location and configured to be electrically coupled with the controller; a first test electrode spaced apart from the movable mass and mounted to the substrate at a third location, the first test electrode being electrically isolated from the controller, and the first test electrode being configured to be electrically connected to a first external electrical connecter and to be biased at a first voltage when the first external electrical connector is connected to a first electric power source; and a second test electrode spaced apart from the movable mass and mounted to the substrate at a fourth location, the second test electrode being electrically isolated from the controller, and the second test electrode being configured to be electrically connected to a second external electrical connector and to be biased at a second voltage when the second external electrical connector is connected to a second electric power source, wherein the controller is configured to detect a differential between a first capacitance existing between the movable mass and the first sense electrode and a second capacitance existing between the movable mass and the second sense electrode, and wherein the first test electrode and the second test electrode are configured to generate a net electrostatic force to move the movable mass with respect to the first sense electrode and the second sense electrode to create the differential between the first capacitance and the second capacitance when the first external electrical connector or the second external electrical connector are electrically connected to the first electric power source or the second electric power source, respectively.