发明名称 |
Fluorinated monomer, polymer, resist composition, and patterning process |
摘要 |
A fluorinated monomer has formula (1) wherein R1 is H, F, methyl or trifluoromethyl, R2 and R3 are H or a monovalent hydrocarbon group, R4 to R6 each are a monovalent fluorinated hydrocarbon group, A is a divalent hydrocarbon group, and k1 is 0, 1 or 2. A polymer derived from the fluorinated monomer may be endowed with appropriate water repellency, water slip, acid lability and hydrolysis and is useful as an additive polymer in formulating a resist composition.; |
申请公布号 |
US9115074(B2) |
申请公布日期 |
2015.08.25 |
申请号 |
US201314142588 |
申请日期 |
2013.12.27 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
Sagehashi Masayoshi;Hasegawa Koji;Sasami Takeshi |
分类号 |
C07C69/013;C07C69/653;G03F7/004;C07D317/34;C07D317/72;C08F220/22;C08F220/24;C08F220/18;C08F222/18;C08F222/20;C08F222/22;C08F220/28;G03F7/039;C08F24/00 |
主分类号 |
C07C69/013 |
代理机构 |
Birch, Stewart, Kolasch & Birch, LLP |
代理人 |
Birch, Stewart, Kolasch & Birch, LLP |
主权项 |
1. A fluorinated monomer having the general formula (1): wherein R1 is hydrogen, fluorine, methyl or trifluoromethyl, R2 and R3 are each independently hydrogen or a straight, branched or cyclic C1-C15 monovalent hydrocarbon group, R2 and R3 may bond together to form a non-aromatic ring with the carbon atom to which they are attached, R4 to R6 each are a C1-C6 monovalent fluorinated hydrocarbon group, A is a straight, branched or cyclic C1-C10 divalent hydrocarbon group, and k1 is an integer of 0 to 2. |
地址 |
Tokyo JP |