SEMICONDUCTOR DEVICE HAVING STABLE GATE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

摘要

The present invention relates to a semiconductor device having stable gate structure and a method for manufacturing the same. In a gate structure which has a micro gate foot having a linewidth of 0.2μm or less and a gate head with a size, gate foots are formed under the gate head in the lengthwise direction of the gate head so that it can function as a supporter. Thereby, it can be prevented that the gate of a device collapses in or after a process. The reliability of the device can be improved in or after the process.