Semiconductor device with a resonator using acoustic standing wave excited in semiconductor crystal

摘要

A semiconductor device according to an embodiment has: a semiconductor substrate; an acoustic resonator formed on the semiconductor substrate, having a semiconductor layer including impurity electrically isolated from the substrate by depletion layer and configured to resonate at a predetermined resonance frequency based on acoustic standing wave excited in the semiconductor layer; a temperature detector formed on the semiconductor substrate and configured to detect temperature of the semiconductor substrate; a calculating unit formed on the semiconductor substrate and configured to perform calculation of temperature compensation based on the temperature detected by the temperature detector, kind of the impurity and concentration of the impurity; and a controller formed on the semiconductor substrate and configured to control the resonance frequency based on a result of the calculation by the calculating unit.

主权项

1. A semiconductor device comprising:
a first conductive type semiconductor substrate; an acoustic resonator formed on the semiconductor substrate, the acoustic resonator comprising a first conductive type semiconductor layer including first conductive type impurity, the semiconductor layer is electrically isolated from the semiconductor substrate by a second conductive type semiconductor well region both in direction vertical to a surface of the semiconductor layer and in direction parallel to the surface of the semiconductor layer, the semiconductor layer being surrounded by the semiconductor well region at the surface of the semiconductor layer, a device isolation structure surrounding the semiconductor layer forms a boundary between the semiconductor layer and the semiconductor well region at the surface of the semiconductor layer, the acoustic resonator resonates at a resonance frequency based on acoustic standing wave excited in the semiconductor layer, the semiconductor substrate, the semiconductor layer and the semiconductor well region are formed in a same single crystal; at least one electric terminal provided directly on the surface of the semiconductor layer; a temperature detector formed on the semiconductor substrate, the temperature detector detects temperature of the semiconductor substrate; a calculating unit formed on the semiconductor substrate, the calculating unit performs calculation of temperature compensation based on the temperature detected by the temperature detector, kind of the impurity and concentration of the impurity; and a controller formed on the semiconductor substrate, the controller controls the resonance frequency based on a result of the calculation by the calculating unit.