发明名称 |
TRANSISTOR, SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
A semiconductor device may include: conductive layers which have defined center region and side regions located on both sides of the center region, and include a first barrier pattern formed in the center region, a material pattern which is formed in the first barrier pattern and has etch selectivity with the first barrier pattern, and a second barrier pattern formed in the material pattern; and insulating layers which are alternately stacked with the conductive patterns. |
申请公布号 |
KR20150096582(A) |
申请公布日期 |
2015.08.25 |
申请号 |
KR20140017372 |
申请日期 |
2014.02.14 |
申请人 |
SK HYNIX INC. |
发明人 |
LEE, KI HONG;BIN, JIN HO;KIM, SOO JIN;PYI, SEUNG HO |
分类号 |
H01L27/115 |
主分类号 |
H01L27/115 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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