发明名称 TRANSISTOR, SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device may include: conductive layers which have defined center region and side regions located on both sides of the center region, and include a first barrier pattern formed in the center region, a material pattern which is formed in the first barrier pattern and has etch selectivity with the first barrier pattern, and a second barrier pattern formed in the material pattern; and insulating layers which are alternately stacked with the conductive patterns.
申请公布号 KR20150096582(A) 申请公布日期 2015.08.25
申请号 KR20140017372 申请日期 2014.02.14
申请人 SK HYNIX INC. 发明人 LEE, KI HONG;BIN, JIN HO;KIM, SOO JIN;PYI, SEUNG HO
分类号 H01L27/115 主分类号 H01L27/115
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