发明名称 Method of manufacturing flexible substrate and method of manufacturing display device using the same
摘要 A sacrificial layer is formed on a support substrate and a flexible substrate is formed on the sacrificial layer. Pixels are then formed on the flexible substrate. The sacrificial layer is heated by microwave energy, and a gas is discharged from the sacrificial layer. The flexible substrate, including the pixels formed thereon, is separated from the support substrate including the sacrificial layer formed thereon using the gas.
申请公布号 US9118037(B2) 申请公布日期 2015.08.25
申请号 US201414451705 申请日期 2014.08.05
申请人 Samsung Display Co., Ltd. 发明人 Khachatryan Hayk;Koo Hyunwoo;Kim Sunho;Kim Taewoong
分类号 H01L21/30;H01L21/46;H01L51/56;H01L51/00;G02F1/1333 主分类号 H01L21/30
代理机构 H.C. Park & Associates, PLC 代理人 H.C. Park & Associates, PLC
主权项 1. A method of manufacturing a display device, comprising: forming a sacrificial layer on a support substrate; forming a flexible substrate on the sacrificial layer; forming pixels on the flexible substrate; heating the sacrificial layer using microwave energy to generate a gas from the sacrificial layer, and thereby weakening a bonding between the flexible substrate and the sacrificial layer; and separating the flexible substrate from the support substrate using the gas.
地址 Yongin KR