发明名称 |
Method of manufacturing flexible substrate and method of manufacturing display device using the same |
摘要 |
A sacrificial layer is formed on a support substrate and a flexible substrate is formed on the sacrificial layer. Pixels are then formed on the flexible substrate. The sacrificial layer is heated by microwave energy, and a gas is discharged from the sacrificial layer. The flexible substrate, including the pixels formed thereon, is separated from the support substrate including the sacrificial layer formed thereon using the gas. |
申请公布号 |
US9118037(B2) |
申请公布日期 |
2015.08.25 |
申请号 |
US201414451705 |
申请日期 |
2014.08.05 |
申请人 |
Samsung Display Co., Ltd. |
发明人 |
Khachatryan Hayk;Koo Hyunwoo;Kim Sunho;Kim Taewoong |
分类号 |
H01L21/30;H01L21/46;H01L51/56;H01L51/00;G02F1/1333 |
主分类号 |
H01L21/30 |
代理机构 |
H.C. Park & Associates, PLC |
代理人 |
H.C. Park & Associates, PLC |
主权项 |
1. A method of manufacturing a display device, comprising:
forming a sacrificial layer on a support substrate; forming a flexible substrate on the sacrificial layer; forming pixels on the flexible substrate; heating the sacrificial layer using microwave energy to generate a gas from the sacrificial layer, and thereby weakening a bonding between the flexible substrate and the sacrificial layer; and separating the flexible substrate from the support substrate using the gas. |
地址 |
Yongin KR |