发明名称 |
Semiconductor package with through silicon vias |
摘要 |
A method of forming a light-emitting diode (LED) device is provided. The method includes steps of providing a first substrate, forming an LED structure on the first substrate, forming a porous layer on the first substrate after forming the LED structure, forming a conductive substrate on the LED structure, and separating the LED structure from the first substrate along the porous layer. The substrate has a doped layer. The forming of the porous layer includes a step of converting the dopes layer to the porous layer. |
申请公布号 |
US9117943(B2) |
申请公布日期 |
2015.08.25 |
申请号 |
US201414466172 |
申请日期 |
2014.08.22 |
申请人 |
TSMC SOLID STATE LIGHTING LTD. |
发明人 |
Chen Ding-Yuan;Yu Chen-Hua;Chiou Wen-Chih |
分类号 |
H01L33/00;H01L21/78;H01S5/12;H01S5/227 |
主分类号 |
H01L33/00 |
代理机构 |
Muncy, Geissler, Olds & Lowe, P.C. |
代理人 |
Muncy, Geissler, Olds & Lowe, P.C. |
主权项 |
1. A method of forming a light-emitting diode (LED) device, the method comprising:
providing a first substrate, the substrate having a doped layer; forming an LED structure on the first substrate; forming a porous layer on the first substrate after forming the LED structure; forming a conductive substrate on the LED structure; and separating the LED structure from the first substrate along the porous layer. |
地址 |
Hsinchu TW |