发明名称 Semiconductor package with through silicon vias
摘要 A method of forming a light-emitting diode (LED) device is provided. The method includes steps of providing a first substrate, forming an LED structure on the first substrate, forming a porous layer on the first substrate after forming the LED structure, forming a conductive substrate on the LED structure, and separating the LED structure from the first substrate along the porous layer. The substrate has a doped layer. The forming of the porous layer includes a step of converting the dopes layer to the porous layer.
申请公布号 US9117943(B2) 申请公布日期 2015.08.25
申请号 US201414466172 申请日期 2014.08.22
申请人 TSMC SOLID STATE LIGHTING LTD. 发明人 Chen Ding-Yuan;Yu Chen-Hua;Chiou Wen-Chih
分类号 H01L33/00;H01L21/78;H01S5/12;H01S5/227 主分类号 H01L33/00
代理机构 Muncy, Geissler, Olds & Lowe, P.C. 代理人 Muncy, Geissler, Olds & Lowe, P.C.
主权项 1. A method of forming a light-emitting diode (LED) device, the method comprising: providing a first substrate, the substrate having a doped layer; forming an LED structure on the first substrate; forming a porous layer on the first substrate after forming the LED structure; forming a conductive substrate on the LED structure; and separating the LED structure from the first substrate along the porous layer.
地址 Hsinchu TW