发明名称 OPTICAL MEMBER, AND EXPOSING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To address the problem that the thickness of an optical member causes the vignetting of transmitted light to increase, thereby inviting distortion of the shape of transmitted light or measuring of the light in an apparently deviated position.SOLUTION: An optical member comprises a substrate and a metal membrane formed on one face of the substrate. In the metal membrane, which has a diameter larger than the wavelength of incident light, a pinhole penetrating the metal membrane, and a plurality of concaves which are periodically arrayed farther out than the pinhole at shorter intervals than the wavelength, whose size in the diametric direction of the pinhole is smaller than the wavelength and which excite surface plasmon, are formed.</p>
申请公布号 JP2015152486(A) 申请公布日期 2015.08.24
申请号 JP20140027648 申请日期 2014.02.17
申请人 NIKON CORP 发明人 MORI DAISUKE
分类号 G01M11/02;G02B5/00;H01L21/027 主分类号 G01M11/02
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