发明名称 RESIN MOLDING DEVICE AND METHOD
摘要 <p>PROBLEM TO BE SOLVED: To appropriately perform underfill-molding and over-molding of a flip-chip mounted semiconductor device.SOLUTION: A device for molding a semiconductor device (1) in which a semiconductor chip (2) is flip-chip mounted on a substrate (3) with resin, comprises: a mold die (101) having an upper die (102) and a lower die (103); and a movable cavity (104) provided on the mold die (101). In the device, a resin is injected in a state where an exposure surface of the semiconductor chip (2) and a cavity inner surface of the mold die (101) are arranged closely or tightly so as to restrict or prevent a flow of a resin on the exposure surface of the semiconductor chip (2), and a resin is filled between the semiconductor chip (2) and the substrate (3). Then, a distance between the exposure surface of the semiconductor chip (2) and the cavity inner surface is widened by the movable cavity (104), and the exposure surface of the semiconductor chip (2) is covered with the resin.</p>
申请公布号 JP2015153757(A) 申请公布日期 2015.08.24
申请号 JP20140023228 申请日期 2014.02.10
申请人 ASAHI ENGINEERING KK 发明人 ISHII MASAAKI
分类号 H01L21/56 主分类号 H01L21/56
代理机构 代理人
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