| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a non-dispersive infrared analyzing gas sensor configured to use an MEMS heater as an optical source to restrain reduction in gas detection accuracy.SOLUTION: A non-dispersive infrared analyzing gas sensor 1 comprises a window material 55, so that target gas introduced into a measuring cell 13 can be prevented from reaching an optical source 11 (particularly, a hot MEMS heater 21), thereby restraining the target gas from reacting due to the MEMS heater 21. The gas sensor 1 can thus restrain the reaction of the target gas to restrain decrease in gas detection accuracy. The gas sensor 1 can use infrared reflection with a plurality of reflection surfaces so as to secure a long infrared path (optical object distance) without upsizing the measuring cell 13. Therefore, the gas sensor 1 can restrain upsizing of the measuring cell 13 while securing a long optical object distance, thereby improving gas detection accuracy.</p> |
