| 摘要 |
<p>A solidly mounted resonator (SMR) device includes an acoustic reflector including stacked acoustic reflector layer pairs, and each stacked acoustic reflector layer pair comprises a lower acoustic impedance layer formed with a low acoustic impedance material stacked on a high acoustic impedance layer formed with a high acoustic impedance material. The SMR device further includes a lower electrode arranged on the acoustic reflector; a piezoelectric layer arranged on the lower electrode; and an upper electrode arranged on the piezoelectric layer. A collar is formed outside a main active area defined by overlap between the upper electrode, the piezoelectric layer, and the lower electrode, and at least one frame is arranged in the main active area. The collar includes an inner edge substantially aligned with the boundary of the main active area or overlapped with the main active area, and at least one frame includes an outer edge substantially aligned with the boundary of the main active area.</p> |
