发明名称 |
HIGH-TEMPERATURE GRADE STEEL FOR FLUIDIZED BED REACTOR EQUIPMENT |
摘要 |
<p>Embodiments of a reaction chamber liner for use in a heated silicon deposition reactor are disclosed. The liner has an upper portion, a mid portion comprising a material other than a stainless steel alloy, and a lower portion comprising a martensitic stainless steel alloy. The liner's upper portion may have a composition substantially similar to the lower portion.</p> |
申请公布号 |
KR20150096458(A) |
申请公布日期 |
2015.08.24 |
申请号 |
KR20157018473 |
申请日期 |
2013.12.10 |
申请人 |
REC SILICON INC. |
发明人 |
SPANGLER MICHAEL V.;MILLER MATTHEW J. |
分类号 |
C23C16/442;C21D1/25;C21D6/00;C22C38/18;C22C38/40;C23C16/24 |
主分类号 |
C23C16/442 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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