METHOD OF PREVENTING OCCURRENCE OF DEFECTIVE PRODUCTS

摘要

The present invention relates to a method for preventing detective products from being generated by electrostatic. The method includes the steps of: (a) obtaining a final equation to be used as an equation including a dependent variable, which is humidity of an area surrounding a manufacturing apparatus, and an independent variable, which is a defective rate in the manufacturing apparatus; (b) obtaining a trend of change in the surrounding area humidity over time; (c) finding surrounding area humidity at a time point at which preset time has elapsed from the current time by referring the trend of change in the surrounding area humidity; (d) finding a defective ratio, corresponding to surrounding area humidity at a time point at which preset time has elapsed, by using a final equation; and (e) alarming if the found defective ratio is greater than a reference value.