SCAN UNIT, LASER SCANNING MICROSCOPE AND TEMPERATURE ADJUSTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a scan unit capable of effectively controlling the heat generated from a laser light source and a scanning optical system while reducing the size of a scanning mechanism including the laser light source and the scanning optical system.SOLUTION: The scan unit includes: a first base mounted with a scanning mechanism which at least includes a laser light source unit that emits a laser beam of a predetermined wavelength and a scan part that scans an object by using the laser beam; a second base which is positioned being thermally separated from the first base at the side opposite to the side on which the scanning mechanism is disposed on the first base; and a temperature control mechanism disposed between the first base and the second base for controlling the temperature of the scanning mechanism.