| 摘要 |
PROBLEM TO BE SOLVED: To prevent the relative precision of a capacitance value of a capacitor group included in a capacitor array from being deteriorated by a parasitic capacitor.SOLUTION: A capacitor array 12 includes a plurality of capacitors, which are provided while being spaced apart from each other, each including a first electrode 41 and a second electrode 42 provided in at least one layer. First wiring 460 is connected to each of the first electrodes in the plurality of capacitors and provided in any layer so as to pass a clearance between the plurality of capacitors. Second wiring 450 is connected to each of the second electrodes in the plurality of capacitors and provided in a layer that is spaced apart from the layer in which the first wiring is provided, by at least one layer so as to pass the clearance between the plurality of capacitors. A first conductor 50 extends in the clearance between the plurality of capacitors so as to be interposed between the first wiring and the second wiring in a layer between the layer where the first wiring is provided and the layer where the second wiring is provided. |
