| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an adhesive sheet for an electrostatic chuck in which production is facilitated, a material yield is high, and homogeneity is excellent, a method for producing the same, and a method for producing an electrostatic chuck.SOLUTION: Provided is an adhesive sheet 5 for an electrostatic chuck used for joining between an adsorption supporting member provided with an electrode for adsorption and a base member. The adhesive sheet 5 has a plurality of semi-cured adhesive layers 50. Each semi-cured adhesive layer 50 is obtained by emitting light L to each curable resin adhesive 500 containing a photoinitiator and a thermal initiator and curing the curable resin adhesive 500 with the photoinitiator so as to be a semi-cured state.</p> |
