| 摘要 |
PROBLEM TO BE SOLVED: To simplify a configuration of a reflectron for reversing a flight orbit of an ion and furthermore to achieve high mass accuracy and mass resolution.SOLUTION: The reflectron is comprised of: an electrode part 5A including a cylindrical-shaped high-resistance electrode part 51 made of silicon carbide; and a DC power supply part 6 applying a voltage to both ends of the electrode part 5A. A resistance value of the high-resistance electrode part 51 per an axial-direction unit length is adjusted by adjusting a thickness of a cylindrical part of the high-resistance electrode part 51, and thereby, a potential gradient in the axial direction in a reflection electric field is set to a desired shape (e.g., a straight line shape, a curved shape). Since a precision processing accuracy for a silicon carbide product is high, a uniformity error in electric resistance can be suppressed to a low level, and the potential gradient of the reflection electric field can be matched to a design value with accuracy. |
