SCANNING SYNCHRONIZATION METHOD IN INTERFEROMETRY

摘要

The present invention relates to a scanning synchronization method in an interferometry. It includes a vibration signal generating step, a third vibration signal generating step, a vibration step, an image trigger generation step, and an applying step. The vibration signal generating step generates a first vibration signal with constant period for vibrating an object, and a second vibration signal of a pulsed waveform synchronized with the first vibration signal. The vibration step vibrates the object by using the first vibration signal. The third vibration signal generating step generates a third vibration signal which is delayed with a constant phase value according to the integer time of the period of the second vibration signal. The image trigger generation step generates an image trigger signal by sampling the third vibration signal according to the pulse delayed in the third vibration signal. The applying step applies an image trigger signal to the image obtaining part to obtain the image of the object. Therefore, while the object vibrates, the image of the object with different phase can be obtained.