SEMICONDUCTOR OPTICAL WAVEGUIDE ELEMENT AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To improve controllability of the cross-sectional shape of an optical waveguide when ensuring mode matching of propagation light, regarding a semiconductor optical waveguide element and a method for manufacturing the same.SOLUTION: A buffer part comprising an optical waveguide layer wider than a wide width part of a taper-shaped connection part is provided between the taper-shaped connection part of a rib type optical waveguide and the taper-shaped connection part of a channel type optical waveguide.