发明名称 CONFOCAL OPTICAL SCANNER
摘要 PROBLEM TO BE SOLVED: To provide a confocal optical scanner that allows a super-resolution image having effects of spurious resolution due to image processing or artifact suppressed to be obtained in real time, and is simple in configuration and inexpensive, is easy in optical adjustment and high in environmental stability.SOLUTION: A confocal scanner according to the present invention is a confocal optical scanner that includes optical filtering means having a plurality of pinholes, and scanning means scanning light on a sample. The optical filtering means comprises: a tabular main body; the pinholes that are disposed on one main surface side of the main body; and a microlens that is disposed at a location approximately coaxial with the pinholes in the other main surface of the main body.
申请公布号 JP2015152836(A) 申请公布日期 2015.08.24
申请号 JP20140027918 申请日期 2014.02.17
申请人 YOKOGAWA ELECTRIC CORP 发明人 HIGASHI TAKUYA
分类号 G02B21/00;G02B3/00 主分类号 G02B21/00
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