| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an ancillary structure designed to suppress or prevent, and mitigate a lateral mode of an acoustic resonator.SOLUTION: A solidly mounted resonator (SMR) device (acoustic resonator 100B) includes an acoustic reflector (distributed Bragg reflector (DBR) 160) having a pair of stacked acoustic reflector layers. The SMR device further includes: a bottom electrode 115 disposed on the acoustic reflector; a piezoelectric layer 125 disposed on the bottom electrode; and a top electrode 135 disposed on the piezoelectric layer. A collar 140 is formed outside a main active region 152 defined by an overlap between the top electrode, the piezoelectric layer and the bottom electrode, and at least one frame 145 is disposed within the main active region. The collar has an inner edge substantially aligned with a boundary of or overlapping the main active region. The at least one frame has an outer edge substantially aligned with the boundary of the main active region.</p> |
