| 摘要 |
In the structure of supplying a coating liquid through a supply pipe with respect to a moving nozzle, the purpose is to provide a coating apparatus capable of reducing an uneven flow rate of a coating liquid discharged from a nozzle wherein pipes (832 to 834) fixedly disposed in relation to a coating unit (50) are disposed along a YZ plane perpendicular to the moving direction (X direction) of the coating unit (50). Therefore, due to an inertial force by means of the reciprocation, it is possible to prevent effectively an occurrence of pressure changes in the flow direction with respect to the coating liquid flowing in the pipes (832 to 834). In addition, the pipes (832, 833) act as a pressure change absorption unit, and therefore, are able to absorb pressure changes of the coating liquid flowing therein. In this way, the coating liquid, in which pressure changes are reduced, can be discharged from the nozzle connected to the pipe (834). |
