CAPACITIVE PRESSURE SENSOR AND INPUT DEVICE

摘要

Provided is a capacitive pressure sensor wherein an initial strain is hard to occur in a diaphragm. An upper surface of a fixed electrode substrate (32) is covered by a dielectric film (33). A recess (34) (convex portion) is formed in one direction of the upper surface or the lower surface of a compressive stress film (38). An upper substrate (35) is stacked on the dielectric film (33). An area facing the recess (34) among the upper substrate (35) comprises the diaphragm capable of being elastically deformed. The compressive stress film (38) is formed on at least a portion of the upper surface of the diaphragm.