| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement detector that have a high degree of freedom in arranging imaging means, and can detect the displacement of an object to be positioned by imaging from a single imaging direction when the object to be positioned is imaged and the displacement from a reference position is detected, and to provide an apparatus for processing a substrate, a method for detecting displacement, and a method for processing a substrate.SOLUTION: In order to detect the displacement of a nozzle 53 moving in the approaching/separating direction from a camera 72, the imaging direction Di of the camera 72 is made oblique so as to cross the movement plane of the nozzle 53. In an imaged image IM, the displacement of the nozzle 53 is reflected as vertical movement, and the position of the nozzle 53 in the image is detected by pattern matching processing. Thus, the displacement of the nozzle 53 having a component of the depth direction of the image is detected. |
