| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a physical quantity sensor with which it is possible to perform detection with high accuracy while reducing the size, and a pressure sensor, an altimeter, an electronic apparatus, and a moving body equipped with this physical quantity sensor.SOLUTION: A physical quantity sensor according to the present invention comprises a diaphragm part 24 that undergoes flexural deformation under pressure, a strain detection element 221 disposed in the diaphragm part 24, a cavity S disposed on one surface side of the diaphragm part 24, a base part of a semiconductor substrate 6 facing the diaphragm part 24 via the cavity S, and a temperature detection element 61 disposed in the base part and formed using a film deposition method.</p> |
