ELECTRODE, FERROELECTRIC CERAMIC, AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric film with excellent piezoelectric characteristics.SOLUTION: A ferroelectric ceramic comprises a first Sr(TiRu)Ofilm 111 formed by sputtering on a Pt film 103 epitaxially grown by sputtering, a PZT film 112 formed on the first Sr(TiRu)Ofilm, and a second Sr(TiRu)Ofilm 113 formed by sputtering on the PZT film 112 short of lead. x satisfies the following formula: 0.01≤x≤0.4...formula 1.