| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of improving detection characteristic, and an electronic apparatus and a moving body equipped with the angular velocity sensor.SOLUTION: An angular velocity sensor 1 comprises: a ring part 20 extending, along the XY plane defined by X and Y axes, with three virtual axes intersecting each other at right angles being assumed respectively to be X, Y, and Z axes, in ring form centering on an intersection O of the X and the Y axes viewed from the direction of the Z axis; four first arm parts 21, 23, 24, 26 extending to the inside of the ring part 20 from each of the intersections, with the ring part 20, of four virtual lines L1-L4 extending from the intersection O in radial form to each of four virtual areas divided by the X and the Y axes; and two second arm parts 22, 25 extending, along the Y axis, from each of the intersections of the Y axis with the ring part 20 to the inside of the ring part 20, the four arm parts 21, 23, 24, 26 constituting a drive part 40, the two second arm parts 22, 25 constituting a detection part 60 for detecting an angular velocity ω around the Z axis. |
