ROBOT FOR TRANSFEERING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

摘要

The present invention relates to a substrate processing apparatus including: a load lock chamber to allow a substrate transferred from the outside to be laid, wherein the inside is converted into a vacuum state or an atmospheric pressure state; a substrate processing module wherein a process for the substrate is carrier out; a transfer chamber placed between the load lock chamber and the substrate processing module and having an internal space to allow the substrate to be transferred; and a substrate transfer robot provided inside the transfer chamber to transfer the substrate.