| 摘要 |
The present invention provides a prober capable of preventing a reduction in inspection throughput of a semiconductor device of a substrate. A prober (10) comprises: a stage (11) having a horizontal mounting surface (11a) on which a wafer (W) on which a semiconductor device is formed is mounted; a probe card (16) facing the stage; and three roller mechanisms (26) which have vertical rotational shafts, and are arranged around the mounted wafer (W) at circumferentially equal intervals. Each roller mechanism (26) comes in contact with the circumference of the wafer (W) to rotate the wafer (W) on a horizontal surface. |
