PROBE CARD HAVING INTERCHANGEABLE THIN FILM IN DAMAGED AND METHOD FOR INTERCHANGING THIN FILM IN DAMAGED

摘要

A probe card capable of replacing a damaged thin film resistor of the present invention has a wiring line in a probe substrate and an upper surface port on the probe card which interface an electric signal between a tester and a probe. The probe card of the present invention includes: a thin film resistor pattern which has a first thickness on the probe substrate in order to provide resistance to a path of the electric signal interfaced by the wiring line; a pair of thin film circuit patterns which have a second thickness larger than the first thickness on the probe substrate, and are connected to both ends of the thin film resistor pattern electrically; and a protective film which is stacked on the thin film resistor pattern and the thin film circuit pattern to protect the thin film resistor pattern and the thin film circuit patterns, and exposes the thin film circuit patterns through opening for resistor replacement. According to the present invention, it is easy to replace the damaged thin film resistor.