SYSTEM AND METHOD FOR IMPROVING THE ACCURACY OF A RATE OF DECAY MEASUREMENT FOR REAL TIME CORRECTION IN A MASS FLOW CONTROLLER OR MASS FLOW METER BY USING A THERMAL MODEL TO MINIMIZE THERMALLY INDUCED ERROR IN THE ROD MEASUREMENT

摘要

The disclosed embodiments include a method, apparatus, and computer program product for improving the accuracy of a rate of decay measurement for real time correction in a mass flow controller or mass flow meter by using a thermal model to minimize thermally induced error in the rate of decay measurement.

主权项

1. A mass flow controller comprising:
an inlet for receiving the fluid; a flow path in which the fluid passes through the mass flow controller; a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the flow path; a pressure transducer coupled to the flow path configured to measure pressure at a point in the flow path; an adjustable valve for regulating a flow of the fluid out of an outlet of the mass flow controller; a controller configured to apply a valve control signal to adjust the adjustable valve to a desired valve position to control the flow of the fluid out of an outlet of the mass flow controller; and at least one processing component configured to execute instructions to improve the accuracy of a rate of decay measurement by using a thermal model to minimize thermally induced error in the rate of decay measurement.