METAL OXIDE NANOPARTICLES AND PHOTORESIST COMPOSITIONS

摘要

The invention provides new nanoparticles that include a Group 4 metal oxide core and a coating surrounding the core, where the coating contains a ligand according to Formula (I), or a carboxylate thereof. The invention also provides new photoresist compositions that include a photoacid generator and a ligand acid or carboxylate thereof, where pKaPAG is lower than pKaLA. Methods for patterning a substrate using the inventive photoresist composition are also provided.

主权项

1. A nanoparticle comprising:
a core comprising a Group 4 metal oxide; and a coating surrounding the core, said coating comprising a ligand selected from an organic acid according to Formula (I): and a carboxylate thereof, wherein R1, R2, R3, R4, and R5 are each individually selected from hydrogen, C1-8 hydrocarbyl, halogen, hydroxyl, acyl, C1-8 hydrocarbylcarboxy, C1-8 hydrocarbyloxy, C1-8 hydrocarbyloxycarbonyl, carboxy, haloC1-8hydrocarbyl, C1-8 hydrocarbylthio, mercapto, cyano, thiocyanate, C1-8 hydrocarbylsulfinyl, C1-8 hydrocarbylsulfonyl, aminosulfonyl, amino, nitro, and acetamide, or two adjacent R1-R5 groups, together with the carbon atoms to which they are attached, may form a 4-, 5- or 6-membered carbocyclic ring.