发明名称 MICROMECHANICAL STRUCTURE FOR AN ACCELERATION SENSOR
摘要 Disclosed is a micromechanical structure (100) for an acceleration sensor (200), comprising: - a seismic mass (10) which is asymmetrical in a defined manner in relation to the rotational z axis (A) of the structure (100) of the acceleration sensor (200); and - spring elements (20, 20', 21, 21') which are attached to the seismic mass (10) and to at least one fastening means (30); - the spring elements (20, 20', 21, 21') allow the seismic mass (10) to perform a rotational movement essentially only when an acceleration occurs in a defined sensing direction within a plane that extends substantially perpendicular to the rotational z axis (A).
申请公布号 WO2015120940(A1) 申请公布日期 2015.08.20
申请号 WO2014EP79004 申请日期 2014.12.22
申请人 ROBERT BOSCH GMBH 发明人 CLASSEN, JOHANNES
分类号 G01P15/125;G01P15/08 主分类号 G01P15/125
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