发明名称 |
APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOTOTHERMAL INSPECTION |
摘要 |
Disclosed are methods and apparatus for detecting defects or reviewing defects in a semiconductor sample. The system has a brightfield (BF) module for directing a BF illumination beam onto a sample and detecting an output beam reflected from the sample in response to the BF illumination beam. The system has a modulated optical reflectance (MOR) module for directing a pump and probe beam to the sample and detecting a MOR output beam from the probe spot in response to the pump beam and the probe beam. The system includes a processor for analyzing the BF output beam from a plurality of BF spots to detect defects on a surface or near the surface of the sample and analyzing the MOR output beam from a plurality of probe spots to detect defects that are below the surface of the sample. |
申请公布号 |
WO2015123337(A1) |
申请公布日期 |
2015.08.20 |
申请号 |
WO2015US15471 |
申请日期 |
2015.02.11 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
NICOLAIDES, LENA;MAHADEVAN, MOHAN;SALNIK, ALEX;YOUNG, SCOTT A. |
分类号 |
G01N21/95;G01N21/39;H01L21/66 |
主分类号 |
G01N21/95 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|