| 摘要 |
The objective is to enable a rapid display of the result from a suitable image-quality improvement processing performed on an image that is in the middle of a scan, which has been acquired by a charged particle microscope. The method comprises: for image data (401) within an image acquisition visual field, dividing a region (410), whereof image data has been acquired, into two or more regions (411, 412, 413) on the basis of a distance from a region (414), whereof image data within the visual field has not been acquired; determining for the image data of each of the divided regions an image quality improvement processing method and an image-quality improvement processing parameter that are adapted to the divided regions; and using the processing method and the processing parameter that are adapted to the divided region, which have been determined for the image data of each divided region, to perform image quality improvement processing (415, 416). |
