摘要 |
PROBLEM TO BE SOLVED: To provide a solar cell substrate in which a positional deviation between an electrode and an n-type diffusion layer having high n-type impurity concentration immediately under the electrode is suppressed in a solar cell having a selective emitter structure, and to provide a manufacturing method of the same, a solar cell element, and a solar cell.SOLUTION: Provided are a solar cell substrate including: an n-type diffusion layer; and an n-type diffusion layer, having n-type impurity concentration higher than that of the n-type diffusion layer, a surface of which has a recess part, the manufacturing method of the same, the solar cell element, and the solar cell. |