摘要 |
PROBLEM TO BE SOLVED: To provide a metal plasma source high in ionization probability and thereby capable of generating plasma with a high ionic current, in order to produce a large amount of endohedral fullerenes.SOLUTION: When, for example, Li is used as atoms to be included, Li is charged in a metal sublimation oven 5, a heating wire 7 is heated to generate a Li vapor, and the Li vapor is jetted against a heated metal body 4 through a nozzle-shaped metal vapor introduction pipe 6. Simultaneously at this time, the heated metal body 4 is irradiated with light from a light source 9. For example, a ruby laser light source having a wavelength of 694 nm is used as the light source. Light having a wavelength of 694 nm imparts an energy of 1.79 eV to electrons in a Li atom, so that the electrons are excited and easily transferred to a state energy of a vacancy of the heated metal body. Accordingly, ionization probability can be enhanced. |