| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle analysis device that makes it possible to reduce a measurement time.SOLUTION: A particle analysis device 100 is designed to measure a sample S containing a plurality of particles over a plurality of visual fields and analyze the measured sample S, the particle analysis device including: a measurement unit 10 for scanning a primary line EB on the sample S and detecting a signal generated from the sample S; a particle area integration unit 222 for obtaining a particle area for each visual field from the result of measurement by the measurement unit 10, and integrating the particle areas to obtain an integrated value; and a determination unit 226 for determining whether or not to terminate measurement on the basis of a proportion of the integrated value to the measured area of the sample S for which measurement was made in order to obtain the integrated value. |
