| 发明名称 |
SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK |
| 摘要 |
A method is provided for treating a bipolar ESC having a front surface and a back surface, the front surface including an anodized layer. The method includes eliminating the anodized layer, disposing a new anodized layer onto the front surface, and treating the new anodized layer with water to seal the new anodized layer. |
| 申请公布号 |
US2015235889(A1) |
申请公布日期 |
2015.08.20 |
| 申请号 |
US201514704602 |
申请日期 |
2015.05.05 |
| 申请人 |
Lam Research Corporation |
发明人 |
Shih Hong;Huang Tuochuan;Schaefer David;Chhatre Ambarish;Daugherty John;Wu MingHang;La Croix Clifford |
| 分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A bipolar ESC having a front surface and a back surface, the front surface having an anodized layer comprising a first layer of Al2O3 and a second layer of Al2O3,
wherein the first layer of Al2O3 has a first thickness and a first density, wherein the second layer of Al2O3 has a second thickness and a second density, wherein the first thickness is less than the second thickness, and wherein the first density is greater than the second density. |
| 地址 |
Fremont CA US |
