Modular Flow Cell and Adjustment System

摘要

A combinatorial processing system having modular dispense heads is provided. The modular dispense heads are disposed on a rail system enabling an adjustable pitch of the modular dispense heads for the combinatorial processing. The modular dispense heads are configured so that sections of the modular dispense heads are detachable in order to accommodate various processes through a first section without having to completely disconnect and re-connect facilities to a second section.

主权项

1. A combinatorial processing system, comprising:
a reaction chamber configured to define a site-isolated region on a surface of a substrate; a first dispense head section comprising at least one first channel extending therethrough and at least one valve in fluid communication with the at least one first channel, wherein the first dispense head section is configured to be coupled to at least one processing fluid supply such that the at least one first channel is in fluid communication with the at least one processing fluid supply through the at least one valve; and a plurality of second dispense head sections, wherein each of the plurality of second dispense head sections comprises at least one second channel extending therethrough and is configured to be partially inserted into the reaction chamber and detachably coupled to the first dispense head section such that the at least one second channel is in fluid communication with the at least one first channel, and wherein each of the plurality of second dispense head sections is configured to perform a process on the site-isolated region using processing fluid from the at least one processing fluid supply different than the others of the plurality of second sections.