| 发明名称 |
LAYER STRUCTURE FOR A MICROMECHANICAL COMPONENT |
| 摘要 |
A layer structure for a micromechanical component, having:
a first layer, which is usable both for an electrical wiring of the component and as electrode of the component; anda second layer which is resistant to oxide etching and is disposed below the first layer, the second layer being formed essentially in one plane. |
| 申请公布号 |
US2015232331(A1) |
申请公布日期 |
2015.08.20 |
| 申请号 |
US201514624130 |
申请日期 |
2015.02.17 |
| 申请人 |
Robert Bosch GmbH |
发明人 |
GROSSE Axel;STAHL Heiko |
| 分类号 |
B81C1/00;B81B7/00 |
主分类号 |
B81C1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A layer structure for a micromechanical component, comprising:
a first layer, which is usable both for an electrical wiring of the component and as electrode of the component; and a second layer which is resistant to oxide etching and is disposed below the first layer, the second layer being formed essentially in one plane. |
| 地址 |
Stuttgart DE |
