发明名称 METHOD FOR MANUFACTURING MASTER MOLD, MASTER MOLD MANUFACTURED THEREBY, METHOD FOR MANUFACTURING TRANSPARENT PHOTOMASK, TRANSPARENT PHOTOMASK MANUFACTURED THEREBY, AND METHOD FOR FORMING CONDUCTIVE MESH PATTERN USING TRANSPARENT PHOTOMASK
摘要 The present invention relates to a method for manufacturing a master mold, the master mold manufactured thereby, a method for manufacturing a transparent photomask, the transparent photomask manufactured thereby, and a method for forming a conductive mesh pattern using the transparent photomask.
申请公布号 WO2015122721(A1) 申请公布日期 2015.08.20
申请号 WO2015KR01489 申请日期 2015.02.13
申请人 LG CHEM, LTD. 发明人 PARK, JEONGHO;JUNG, JINMI;JEONG, YUJIN;SHIN, BU GON
分类号 G03F7/26;G03F7/20;H01J1/30 主分类号 G03F7/26
代理机构 代理人
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