| 摘要 |
<p>An optical inspection apparatus comprises: a first light source which irradiates a display panel with light having a first wavelength; a second light source which irradiates the display panel with light having a second wavelength; a third light source which irradiates the display panel with light having a third wavelength; a camera which includes a first filter passing the light having the first wavelength reflected from the display panel, a second filter passing the light having the second wavelength reflected from the display panel, a third filter passing the light having the third wavelength reflected from the display panel, a first charge coupling element disposed corresponding to the first filter, a second charge coupling element disposed corresponding to the second filter, and a third charge coupling element disposed corresponding to the third filter; and an image analyzing unit which analyzes a defect of the display panel by combining a first image acquired from the first charge coupling element, a second image acquired from the second charge coupling element, and a third image acquired from the third charge coupling element.</p> |
