INSPECTION APPARATUS AND INSPECTION METHOD

摘要

An inspection apparatus includes an irradiation part that emits plural pieces of pulse light having different wavelengths to irradiate a multi-junction type solar cell; a wavelength setting part that sets the wavelengths of the plural pieces of pulse light with which the multi-junction type solar cell is irradiated by the irradiation part; and a detection part that detects an electric field intensity of an electromagnetic wave emitted from the multi-junction type solar cell in response to the plural pieces of pulse light with which the multi-junction type solar cell is irradiated by the irradiation part. The irradiation part includes a delay element that delays a time the multi-junction type solar cell is irradiated with the pulse light by a time Δt11 relative to the pulse light.

主权项

1. An inspection apparatus that inspects a photo device, the inspection apparatus comprising:
an irradiation part that emits a plurality of pieces of light having different wavelengths to irradiate a photo device; a setting part that sets said wavelengths of said plurality of pieces of light with which said photo device is irradiated by said irradiation part; and a detection part that detects an electric field intensity of an electromagnetic wave emitted from said photo device in response to said plurality of pieces of light with which said photo device is irradiated by said irradiation part.